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Controlling Speckle Contrast Using Existing Lithographic Scanner Knobs to Explore the Impact on Line Width Roughness

  • Heehong Lee
  • , Hyosung Lee
  • , Dirk Van Leuken
  • , Hyungju Rah
  • , Wout Keijers
  • , Seunghui Seon
  • , Younghwi Kim
  • , Ijen Van Mil
  • , Yongchan Kim
  • , Byungdeog Choi
  • Samsung
  • Sungkyunkwan University
  • ASML Netherlands BV

Research output: Contribution to journal › Article › peer-review

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