Controllable crystallinity of synthesized In-Ga-Zn-O nano-powder by using a pulp precursor for printing processes

IGZO nanoparticles were synthesized using a pulp processor at different temperatures and solution concentrations for the printing processes. The nanoparticles were characterized by field emission scanning electron microscopy (FESEM), powder X-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM). The nanoparticles synthesized in a 10% of solution were 10-20 nm in diameter. On the other hand, the nanoparticles synthesized in 1 and 0.1% solution were ̃10 nm in diameter, as revealed by HRTEM. From the powder XRD and HRTEM results, the crystallinity of the IGZO nanoparticles decreased with decreasing solution concentration. In particular, the crystallinity was affected significantly by the indium concentration.