Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability

Seong Chu Lim; Jin Ho Jang; Dong Jae Bae; Gang Hee Han; Sunwoo Lee; In Seok Yeo; Young Hee Lee

doi:10.1063/1.3255016

Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability

Seong Chu Lim, Jin Ho Jang, Dong Jae Bae, Gang Hee Han, Sunwoo Lee, In Seok Yeo, Young Hee Lee

Research output: Contribution to journal › Article › peer-review

204 Scopus citations

Abstract

The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function difference of electrode metal to CNT. Ti, Cr, and Fe with good wettability showed lower resistance than other metals. Furthermore, no dependence of the contact resistance on the work function difference has been observed. However, the contact resistance of Au, Pd, and Pt with poor wettability increased as the work function difference became larger.

Original language	English
Article number	264103
Journal	Applied Physics Letters
Volume	95
Issue number	26
DOIs	https://doi.org/10.1063/1.3255016
State	Published - 2009
Externally published	Yes

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10.1063/1.3255016

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title = "Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability",

abstract = "The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function difference of electrode metal to CNT. Ti, Cr, and Fe with good wettability showed lower resistance than other metals. Furthermore, no dependence of the contact resistance on the work function difference has been observed. However, the contact resistance of Au, Pd, and Pt with poor wettability increased as the work function difference became larger.",

author = "Lim, \{Seong Chu\} and Jang, \{Jin Ho\} and Bae, \{Dong Jae\} and Han, \{Gang Hee\} and Sunwoo Lee and Yeo, \{In Seok\} and Lee, \{Young Hee\}",

year = "2009",

doi = "10.1063/1.3255016",

language = "English",

volume = "95",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "26",

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TY - JOUR

T1 - Contact resistance between metal and carbon nanotube interconnects

T2 - Effect of work function and wettability

AU - Lim, Seong Chu

AU - Jang, Jin Ho

AU - Bae, Dong Jae

AU - Han, Gang Hee

AU - Lee, Sunwoo

AU - Yeo, In Seok

AU - Lee, Young Hee

PY - 2009

Y1 - 2009

N2 - The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function difference of electrode metal to CNT. Ti, Cr, and Fe with good wettability showed lower resistance than other metals. Furthermore, no dependence of the contact resistance on the work function difference has been observed. However, the contact resistance of Au, Pd, and Pt with poor wettability increased as the work function difference became larger.

AB - The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function difference of electrode metal to CNT. Ti, Cr, and Fe with good wettability showed lower resistance than other metals. Furthermore, no dependence of the contact resistance on the work function difference has been observed. However, the contact resistance of Au, Pd, and Pt with poor wettability increased as the work function difference became larger.

UR - https://www.scopus.com/pages/publications/73649094787

U2 - 10.1063/1.3255016

DO - 10.1063/1.3255016

M3 - Article

AN - SCOPUS:73649094787

SN - 0003-6951

VL - 95

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 26

M1 - 264103

ER -

Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability

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