Comparison and design of resonant network considering the characteristics of a plasma generator

This paper presents a theoretical analysis and experimental study on the resonant network of the power conditioning system (PCS) for a plasma generator. In order to consider the characteristics of the plasma load, the resonant network of the DC-AC inverter is designed and analyzed. Specifically, the design of an LCL resonant network and an LCCL resonant network, which can satisfy the output current specification in consideration of plasma characteristics, is explained in detail. Moreover, the inverter current and phase angle between the inverter voltage and current is derived for evaluating inverter performance. Based on these analysis results, the DC-AC inverter can be designed for a plasma generator considering plasma load characteristics. The theoretical analysis of both networks is validated through the simulation and experimental results.