Comparative study of global warming effects during silicon nitride etching using C3F6O/O2 and C3F6/O2 gas mixtures

  • Ka Youn Kim
  • , Hock Key Moon
  • , Nae Eung Lee
  • , Bo Han Hong
  • , Soo Ho Oh

Research output: Contribution to journal › Article › peer-review

13   Link opens in a new tab Scopus citations

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