Abstract
Ordering formation in In0.52Al0.48As alloys grown on (0 0 1) InP substrates by metalorganic chemical vapor deposition was investigated using transmission electron microscopy (TEM). In the plan-view selective area diffraction pattern, the 12 superlattice reflections around the transmitted spot and the {2 0 0} spots were observed, which are associated with the chalcopyrite- and CuAu-type ordered structures. In the InAlAs consisting of III-III-V elements, these ordered phases with the rod-shaped domains elongated along the [2 2 0] show the coexistence of CuAu- and chalcopyrite-type ordered structures. An atomic model showing the formation process of the diffraction pattern of the chalcopyrite- and CuAu-type ordered structures is presented here based on the TEM results.
| Original language | English |
|---|---|
| Pages (from-to) | 598-601 |
| Number of pages | 4 |
| Journal | Physica B: Condensed Matter |
| Volume | 376-377 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1 Apr 2006 |
| Event | Proceedings of the 23rd International Conference on Defects in Semiconductors - Duration: 24 Jul 2005 → 29 Jul 2005 |
Keywords
- InAlAs
- MOCVD
- Ordering
- TEM