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Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments

  • Lei Xu
  • , Kihong Park
  • , Hong Lei
  • , Pengzhan Liu
  • , Eungchul Kim
  • , Yeongkwang Cho
  • , Taesung Kim
  • , Chuandong Chen
  • Shanghai University
  • Sungkyunkwan University
  • Baotou Research Institute of Rare Earth

Research output: Contribution to journal › Article › peer-review

15   Link opens in a new tab Scopus citations

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