@inproceedings{ae75f2bc45dd4769b334e7544a92dbcc,
title = "Characterization of electrical properties of Si nanocrystals embedded in an insulating layer by scanning probe microscopy",
abstract = "Scanning probe microscope (SPM) with a conducting tip was used to electrically probe silicon nanocrystals (Si NCs) embedded in a SiO2 layer. The Si NCs were generated by the laser ablation method with compressed Si powder followed by a sharpening oxidation. The size of Si NCs is in the range of 10-50 nm, and the density is around 1011 /cm2. Using a conducting tip, the charge was injected directly into each Si NC, and the image contrast change and dC/dV curve shift caused by the trapped charges were monitored. The results were compared with those of the conventional MOS capacitor.",
keywords = "Localized electrical properties, Scanning probe microscopy, Si nanocrystal",
author = "Kim, \{Jung Min\} and Her, \{Hyun Jung\} and Son, \{Jeong Min\} and Y. Khang and Lee, \{Eun Hye\} and Kim, \{Yong Sang\} and Choi, \{Y. J.\} and Kang, \{C. J.\}",
year = "2006",
doi = "10.4028/0-87849-995-4.1094",
language = "English",
isbn = "0878499954",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "1094--1097",
booktitle = "Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7",
note = "7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 ; Conference date: 08-01-2006 Through 11-01-2006",
}