Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes

Soon Gil Yoon; Jaichan Lee; A. Safari

doi:10.1080/10584589508220243

Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes

Soon Gil Yoon, Jaichan Lee, A. Safari

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25 Scopus citations

Abstract

The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.

Original language	English
Pages (from-to)	329-339
Number of pages	11
Journal	Integrated Ferroelectrics
Volume	7
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589508220243
State	Published - Feb 1995
Externally published	Yes

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@article{d948291b21b14e1a9ccd2aea9403c898,

title = "Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes",

abstract = "The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.",

author = "Yoon, \{Soon Gil\} and Jaichan Lee and A. Safari",

year = "1995",

month = feb,

doi = "10.1080/10584589508220243",

language = "English",

volume = "7",

pages = "329--339",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

}

TY - JOUR

T1 - Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes

AU - Yoon, Soon Gil

AU - Lee, Jaichan

AU - Safari, A.

PY - 1995/2

Y1 - 1995/2

N2 - The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.

AB - The chemical composition and electrical properties were investigated for epitaxially crystallized (Ba05,Sr05)TiO3 films deposited on Pt/MgO and YBaz2Cu3O7-x(YBCO)/MgO substrates by the laser ablation technique. Rutherford backscattering spectroscopy (RBS) analysis shows that thin films on Pt/MgO have almost the same stoichiometric composition as the target material. Films deposited on Pt/MgO at 600t: exhibited a dielectric constant of 330 and a dissipation factor of 0.02 at 100 kHz frequency. Leakage current density of BST thin films on Pt/MgO was smaller than on YBCO/MgO. Their leakage current density is about 0.8 μ A/cm2 at an applied electric field of 0.15 MY/cm.

UR - https://www.scopus.com/pages/publications/0000462810

U2 - 10.1080/10584589508220243

DO - 10.1080/10584589508220243

M3 - Article

AN - SCOPUS:0000462810

SN - 1058-4587

VL - 7

SP - 329

EP - 339

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

ER -

Characterization of (ba0,5sr05)tio3 thin films by the laser ablation technique and their electrical properties with different electrodes

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