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Characteristics of rapid-thermal-annealed LiNi1-xCo xO2 cathode films for all-solid-state rechargeable thin film microbatteries

  • Gwangju Institute of Science and Technology
  • Korea Institute of Science and Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

We report on the characteristics of rapid-thermal-annealed LiNi 1-xCoxO2 cathode films for all-solid-state thin film microbatteries (TFBs). Scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy results show that the surface oxide layer formed on the as-deposited LiNi 1-xCoxO2 film is completely removed by a rapid thermal annealing process. All-solid-state TFBs consisting of Li/LiPON/LiNi 1-xCoxO2/Pt/MgO/Si exhibit stable cyclibility and a high specific discharge capacity of 60.2 μAh/cm2μm. It is concluded that the LiyNi1-xCoxO2 cathode could represent a promising candidate for a cathode film in TFBs.

Original languageEnglish
Pages (from-to)619-625
Number of pages7
JournalThin Solid Films
Volume447-448
DOIs
StatePublished - 30 Jan 2004
Externally publishedYes
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: 28 Apr 2002 → 2 May 2002

Keywords

  • Capacity
  • Cyclibility
  • LiNiCoO
  • Rapid thermal annealing
  • Thin film microbattery

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