Characteristics of rapid-thermal-annealed LiCoO2 cathode film for an all-solid-state thin film microbattery

Han Ki Kim; Young Soo Yoon

doi:10.1116/1.1763906

Characteristics of rapid-thermal-annealed LiCoO₂ cathode film for an all-solid-state thin film microbattery

Han Ki Kim
, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

The fabrication of a LiCoO₂ film for an all-solid-state thin film microbattery by using a rapid-thermal-annealing (RTA) process was discussed. The LiCoO₂ films were grown by rf magnetron sputtering using a synthesized LiCoO₂ target in a [O₂/(Ar+O ₂] ratio of 10%. The results show that surface layer on the as-deposited LiCoO₂ film was completely removed by rapid thermal annealing process in oxygen ambient 20 min. It was also observed that the thin film microbattery fabricated with the annealed LiCoO₂ film shows fairly stable cyclability with a specific discharge capacity of 56.49 μAh/cm² μm.

Original language	English
Pages (from-to)	1182-1187
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	4
DOIs	https://doi.org/10.1116/1.1763906
State	Published - Jul 2004
Externally published	Yes

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title = "Characteristics of rapid-thermal-annealed LiCoO2 cathode film for an all-solid-state thin film microbattery",

abstract = "The fabrication of a LiCoO2 film for an all-solid-state thin film microbattery by using a rapid-thermal-annealing (RTA) process was discussed. The LiCoO2 films were grown by rf magnetron sputtering using a synthesized LiCoO2 target in a [O2/(Ar+O 2] ratio of 10\%. The results show that surface layer on the as-deposited LiCoO2 film was completely removed by rapid thermal annealing process in oxygen ambient 20 min. It was also observed that the thin film microbattery fabricated with the annealed LiCoO2 film shows fairly stable cyclability with a specific discharge capacity of 56.49 μAh/cm2 μm.",

author = "Kim, \{Han Ki\} and Yoon, \{Young Soo\}",

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T1 - Characteristics of rapid-thermal-annealed LiCoO2 cathode film for an all-solid-state thin film microbattery

AU - Kim, Han Ki

AU - Yoon, Young Soo

PY - 2004/7

Y1 - 2004/7

N2 - The fabrication of a LiCoO2 film for an all-solid-state thin film microbattery by using a rapid-thermal-annealing (RTA) process was discussed. The LiCoO2 films were grown by rf magnetron sputtering using a synthesized LiCoO2 target in a [O2/(Ar+O 2] ratio of 10%. The results show that surface layer on the as-deposited LiCoO2 film was completely removed by rapid thermal annealing process in oxygen ambient 20 min. It was also observed that the thin film microbattery fabricated with the annealed LiCoO2 film shows fairly stable cyclability with a specific discharge capacity of 56.49 μAh/cm2 μm.

AB - The fabrication of a LiCoO2 film for an all-solid-state thin film microbattery by using a rapid-thermal-annealing (RTA) process was discussed. The LiCoO2 films were grown by rf magnetron sputtering using a synthesized LiCoO2 target in a [O2/(Ar+O 2] ratio of 10%. The results show that surface layer on the as-deposited LiCoO2 film was completely removed by rapid thermal annealing process in oxygen ambient 20 min. It was also observed that the thin film microbattery fabricated with the annealed LiCoO2 film shows fairly stable cyclability with a specific discharge capacity of 56.49 μAh/cm2 μm.

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JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Characteristics of rapid-thermal-annealed LiCoO₂ cathode film for an all-solid-state thin film microbattery

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