Abstract
This study examined the effects of a He/O2 and He/SF 6 atmospheric pressure plasma surface treatment of indium tin oxide (ITO) glass on the ITO surface and electrical characteristics of organic light emitting diodes (OLEDs). The OLEDs composed of ITO glass/2-TNATA/NPD/Alq3/LiF/ Al showed better electrical characteristics, such as lower turn-on voltage, higher power efficiency, etc., after the He/O2 or He/SF6 plasma treatment. The He/SF6 treatment resulted in superior electrical characteristics compared with the He/O2 treatment. The electrical improvement as a result of the He/SF6 and He/O 2 plasma treatments is related to the decrease in the carbon and Sn4+ concentration on the ITO surface and fluorine doping of the ITO possibly indicating a change in the work function as a result of the treatments.
| Original language | English |
|---|---|
| Pages (from-to) | L41-L44 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 44 |
| Issue number | 1-7 |
| DOIs | |
| State | Published - 2005 |
Keywords
- Atmospheric pressure plasma
- He/O
- He/SF
- ITO
- OLED
- Surface treatment
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