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Characteristics of organic light-emitting devices by the surface treatment of indium tin oxide surfaces using atmospheric pressure plasmas

  • Chang Hyun Jeong
  • , June Hee Lee
  • , Yong Hyuk Lee
  • , Nam Gil Cho
  • , Jong Tae Lim
  • , Cheol Hee Moon
  • , Geun Young Yeom
  • Sungkyunkwan University
  • Samsung

Research output: Contribution to journalArticlepeer-review

Abstract

This study examined the effects of a He/O2 and He/SF 6 atmospheric pressure plasma surface treatment of indium tin oxide (ITO) glass on the ITO surface and electrical characteristics of organic light emitting diodes (OLEDs). The OLEDs composed of ITO glass/2-TNATA/NPD/Alq3/LiF/ Al showed better electrical characteristics, such as lower turn-on voltage, higher power efficiency, etc., after the He/O2 or He/SF6 plasma treatment. The He/SF6 treatment resulted in superior electrical characteristics compared with the He/O2 treatment. The electrical improvement as a result of the He/SF6 and He/O 2 plasma treatments is related to the decrease in the carbon and Sn4+ concentration on the ITO surface and fluorine doping of the ITO possibly indicating a change in the work function as a result of the treatments.

Original languageEnglish
Pages (from-to)L41-L44
JournalJapanese Journal of Applied Physics
Volume44
Issue number1-7
DOIs
StatePublished - 2005

Keywords

  • Atmospheric pressure plasma
  • He/O
  • He/SF
  • ITO
  • OLED
  • Surface treatment

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