Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes

Jin A. Jeong; Han Ki Kim; Jae Young Lee; Jung Hwan Lee; Hyo Dae Bae; Yoon Heung Tak

doi:10.1016/j.tsf.2009.01.147

Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes

Jin A. Jeong, Han Ki Kim, Jae Young Lee, Jung Hwan Lee, Hyo Dae Bae, Yoon Heung Tak

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The preparation and characteristics of indium tin oxide (ITO) electrodes grown using a specially designed linear facing target sputtering (LFTS) system with a ladder type magnet arrangement for organic light emitting diodes (OLED) are described. It was found that the electrical and optical properties of the ITO electrode were critically dependent on the Ar/O₂ flow ratio, while its structural and surface properties remained fairly constant regardless of the Ar/O₂ flow ratio, due to the low substrate temperature during the plasma damage-free sputtering. Under the optimized conditions, we obtained an ITO electrode with the lowest sheet resistance of 39.4 Ω/sq and high transmittance of 90.1% (550 nm wavelength) at room temperature. This suggests that LFTS is a promising low temperature and plasma damage free sputtering technology for preparing high-quality ITO electrodes for OLEDs and flexible OLEDs at room temperature.

Original language	English
Pages (from-to)	4043-4046
Number of pages	4
Journal	Thin Solid Films
Volume	517
Issue number	14
DOIs	https://doi.org/10.1016/j.tsf.2009.01.147
State	Published - 29 May 2009
Externally published	Yes

Keywords

Indium tin oxide
Linear facing target sputtering (LFTS)
OLED
Sheet resistance
Transmittance

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10.1016/j.tsf.2009.01.147

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@article{29d87e7867f143c389c97b0173e8a4a8,

title = "Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes",

abstract = "The preparation and characteristics of indium tin oxide (ITO) electrodes grown using a specially designed linear facing target sputtering (LFTS) system with a ladder type magnet arrangement for organic light emitting diodes (OLED) are described. It was found that the electrical and optical properties of the ITO electrode were critically dependent on the Ar/O2 flow ratio, while its structural and surface properties remained fairly constant regardless of the Ar/O2 flow ratio, due to the low substrate temperature during the plasma damage-free sputtering. Under the optimized conditions, we obtained an ITO electrode with the lowest sheet resistance of 39.4 Ω/sq and high transmittance of 90.1\% (550 nm wavelength) at room temperature. This suggests that LFTS is a promising low temperature and plasma damage free sputtering technology for preparing high-quality ITO electrodes for OLEDs and flexible OLEDs at room temperature.",

keywords = "Indium tin oxide, Linear facing target sputtering (LFTS), OLED, Sheet resistance, Transmittance",

author = "Jeong, \{Jin A.\} and Kim, \{Han Ki\} and Lee, \{Jae Young\} and Lee, \{Jung Hwan\} and Bae, \{Hyo Dae\} and Tak, \{Yoon Heung\}",

year = "2009",

month = may,

day = "29",

doi = "10.1016/j.tsf.2009.01.147",

language = "English",

volume = "517",

pages = "4043--4046",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes

AU - Jeong, Jin A.

AU - Kim, Han Ki

AU - Lee, Jae Young

AU - Lee, Jung Hwan

AU - Bae, Hyo Dae

AU - Tak, Yoon Heung

PY - 2009/5/29

Y1 - 2009/5/29

N2 - The preparation and characteristics of indium tin oxide (ITO) electrodes grown using a specially designed linear facing target sputtering (LFTS) system with a ladder type magnet arrangement for organic light emitting diodes (OLED) are described. It was found that the electrical and optical properties of the ITO electrode were critically dependent on the Ar/O2 flow ratio, while its structural and surface properties remained fairly constant regardless of the Ar/O2 flow ratio, due to the low substrate temperature during the plasma damage-free sputtering. Under the optimized conditions, we obtained an ITO electrode with the lowest sheet resistance of 39.4 Ω/sq and high transmittance of 90.1% (550 nm wavelength) at room temperature. This suggests that LFTS is a promising low temperature and plasma damage free sputtering technology for preparing high-quality ITO electrodes for OLEDs and flexible OLEDs at room temperature.

AB - The preparation and characteristics of indium tin oxide (ITO) electrodes grown using a specially designed linear facing target sputtering (LFTS) system with a ladder type magnet arrangement for organic light emitting diodes (OLED) are described. It was found that the electrical and optical properties of the ITO electrode were critically dependent on the Ar/O2 flow ratio, while its structural and surface properties remained fairly constant regardless of the Ar/O2 flow ratio, due to the low substrate temperature during the plasma damage-free sputtering. Under the optimized conditions, we obtained an ITO electrode with the lowest sheet resistance of 39.4 Ω/sq and high transmittance of 90.1% (550 nm wavelength) at room temperature. This suggests that LFTS is a promising low temperature and plasma damage free sputtering technology for preparing high-quality ITO electrodes for OLEDs and flexible OLEDs at room temperature.

KW - Indium tin oxide

KW - Linear facing target sputtering (LFTS)

KW - OLED

KW - Sheet resistance

KW - Transmittance

UR - https://www.scopus.com/pages/publications/65449122283

U2 - 10.1016/j.tsf.2009.01.147

DO - 10.1016/j.tsf.2009.01.147

M3 - Article

AN - SCOPUS:65449122283

SN - 0040-6090

VL - 517

SP - 4043

EP - 4046

JO - Thin Solid Films

JF - Thin Solid Films

IS - 14

ER -

Characteristics of ITO electrode grown by linear facing target sputtering with ladder type magnetic arrangement for organic light emitting diodes

Abstract

Keywords

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