Characteristics of ITO electrode films grown on PET substrate by roll-to-roll facing target sputtering system for flexible OLEDs

Sung Woo Cho; Kwang Hyuk Choi; Jin A. Jeong; Bong Seok Kim; Dae Ju Jeong; Han Ki Kim

Characteristics of ITO electrode films grown on PET substrate by roll-to-roll facing target sputtering system for flexible OLEDs

Sung Woo Cho, Kwang Hyuk Choi, Jin A. Jeong, Bong Seok Kim, Dae Ju Jeong, Han Ki Kim

Research output: Contribution to journal › Conference article › peer-review

Abstract

We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.

Original language	English
Pages (from-to)	613-616
Number of pages	4
Journal	Proceedings of International Meeting on Information Display
Volume	8
State	Published - 2008
Externally published	Yes
Event	8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008 - Ilsan, Korea, Republic of Duration: 13 Oct 2008 → 17 Oct 2008

Keywords

Facing target sputter
Flexible display
ITO
OLED
Roll-to-Roll

Cite this

@article{455100927c734a2e9b95e80f55b744d3,

title = "Characteristics of ITO electrode films grown on PET substrate by roll-to-roll facing target sputtering system for flexible OLEDs",

abstract = "We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.",

keywords = "Facing target sputter, Flexible display, ITO, OLED, Roll-to-Roll",

author = "Cho, \{Sung Woo\} and Choi, \{Kwang Hyuk\} and Jeong, \{Jin A.\} and Kim, \{Bong Seok\} and Jeong, \{Dae Ju\} and Kim, \{Han Ki\}",

year = "2008",

language = "English",

volume = "8",

pages = "613--616",

journal = "Proceedings of International Meeting on Information Display",

issn = "1738-7558",

note = "8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008 ; Conference date: 13-10-2008 Through 17-10-2008",

}

TY - JOUR

T1 - Characteristics of ITO electrode films grown on PET substrate by roll-to-roll facing target sputtering system for flexible OLEDs

AU - Cho, Sung Woo

AU - Choi, Kwang Hyuk

AU - Jeong, Jin A.

AU - Kim, Bong Seok

AU - Jeong, Dae Ju

AU - Kim, Han Ki

PY - 2008

Y1 - 2008

N2 - We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.

AB - We report on electrical and optical properties of flexible ITO electrode grown on PET substrate using a specially designed roll-to-roll facing target sputtering (R2R FTS) system at room temperature without conventional cooling drum. Due to effective confinement of high density plasma between ITO targets, we can grow a flexible ITO electrode without cooling drum at room temperature.

KW - Facing target sputter

KW - Flexible display

KW - ITO

KW - OLED

KW - Roll-to-Roll

UR - https://www.scopus.com/pages/publications/65649147177

M3 - Conference article

AN - SCOPUS:65649147177

SN - 1738-7558

VL - 8

SP - 613

EP - 616

JO - Proceedings of International Meeting on Information Display

JF - Proceedings of International Meeting on Information Display

T2 - 8th International Meeting on Information Display - International Display Manufacturing Conference 2008 and Asia Display 2008, IMID/IDMC/ASIA DISPLAY 2008

Y2 - 13 October 2008 through 17 October 2008

ER -

Characteristics of ITO electrode films grown on PET substrate by roll-to-roll facing target sputtering system for flexible OLEDs

Abstract

Keywords

Other files and links

Fingerprint

Cite this