@inproceedings{a346874ab19f49c4bb92102dd0db2f0e,
title = "Characteristics of inductive coupled plasma with internal linear antenna using multi-polar magnetic field for FPD processing",
abstract = "An internal linear inductive antenna referred to as {"}double comb-type antenna{"} was used for a large-area plasma source with the substrate area of 880mm × 660mm and the effects of multi-polar magnetic field applied by inserting permanent magnets parallel to the linear internal antennas on the plasma characteristics were investigated. By applying the multi-polar magnetic field, high density plasmas on the order of 3.2 × 1011 cm -3 which is 50\% higher than that obtained for the source without multi-polar magnetic field could be obtained at the RF power of 5000W. Also stable impedance matching with a low Q-factor of the plasma system could be obtained. The application of the multi-polar magnetic field not only increased the plasma density but also improved the plasma uniformity (less than 3\%) within the 880mm × 660mm processing area.",
keywords = "Inductively coupled plasma, Internal linear antenn, Large-area",
author = "Lim, \{Jong Hyeuk\} and Kim, \{Kyong Nam\} and Yeom, \{Geun Young\}",
year = "2007",
doi = "10.4028/3-908451-31-0.271",
language = "English",
isbn = "3908451310",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "271--274",
booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",
edition = "PART 1",
note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",
}