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Batch Nanofabrication of Suspended Single 1D Nanoheaters for Ultralow-Power Metal Oxide Semiconductor-Based Gas Sensors

  • Taejung Kim
  • , Wootaek Cho
  • , Beomsang Kim
  • , Junyeong Yeom
  • , Yeong Min Kwon
  • , Jeong Min Baik
  • , Jae Joon Kim
  • , Heungjoo Shin
  • Ulsan National Institute of Science and Technology

Research output: Contribution to journalArticlepeer-review

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