Atomic layer deposition of ruthenium and ruthenium oxide thin films from a zero-valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium complex and o2
- Hyo Jun Jung
- , Jeong Hwan Han
- , Eun Ae Jung
- , Bo Keun Park
- , Jin Ha Hwang
- , Seung Uk Son
- , Chang Gyoun Kim
- , Taek Mo Chung
- , Ki Seok An
- Korea Research Institute of Chemical Technology
- Hongik University
- Sungkyunkwan University
Research output: Contribution to journal › Article › peer-review
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