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Atomic layer deposited Al2O3 for gate dielectric and passivation layer of single-walled carbon nanotube transistors

  • S. K. Kim
  • , Y. Xuan
  • , P. D. Ye
  • , S. Mohammadi
  • , J. H. Back
  • , Moonsub Shim
  • Purdue University
  • University of Illinois at Urbana-Champaign

Research output: Contribution to journal › Article › peer-review

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