Analysis of thin film silicon for photovoltaic applications

J. Yi, R. Wallace, B. Jaganathan, X. Gu, K. Etemadi, W. A. Anderson

Research output: Contribution to journalConference articlepeer-review

Abstract

The properties of thin film amorphous and poly-Si are characterized focusing on the heterostructure type solar cell. Removal of the Mo substrate enabled the analysis of bare thin film Si as well as vertical and lateral structural properties. Through thermally stimulated current (TSC) measurement, the poly-Si grain boundary trap type and activation energy are determined. Lastly, by using RF plasma, hydrogen grain boundary passivation is achieved.

Original languageEnglish
Pages (from-to)1571-1574
Number of pages4
JournalConference Record of the IEEE Photovoltaic Specialists Conference
Volume2
StatePublished - 1994
Externally publishedYes
EventProceedings of the 24th IEEE Photovoltaic Specialists Conference. Part 2 (of 2) - Waikoloa, HI, USA
Duration: 5 Dec 19949 Dec 1994

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