An efficient sampling method for the measurements in the semiconductor manufacturing

Semiconductor manufacturing needs a measure process to confirm whether there are problems in quality after the main process. This paper suggests an automatic sampling method to inspect and measure qualities efficiently based on the change points of equipments and processes. This paper divides the main manufacturing process into unstable sections, semi stable sections and stable sections and creates statistical models of each section. Based on the models, suitable measure rate models are generated. As a result, we have accomplished the high productivity of FAB and the low sampling rate while maintaining the satisfactory level of quality.