Aluminum-doped zinc oxide formed by atomic layer deposition for use as anodes in organic light emitting diodes

Su Cheol Gong, Yong June Choi, Hyuncheol Kim, Chang Sun Park, Hyung Ho Park, Ji Geun Jang, Ho Jung Chang, Geun Young Yeom

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28 Scopus citations

Abstract

Aluminum-doped zinc oxide films produced by atomic layer deposition were investigated for use as anodes in organic light emitting diode (OLED) devices. Al-doped ZnO (AZO) films (∼200 nm thick) were deposited at temperatures of 200, 230, and 260 °C and the AZO film deposited at 260 °C demonstrated carrier mobility, carrier concentration, resistivity, and transmittance values of 16.2 cm2V-1s-1, 5.18 × 1020 cm-3, 7.34 × 10-4 Ωcm, and 90%, respectively. OLED devices with a DNTPD/TAPC/Bebq2:10% doped RP-411/Bphen/LiF/Al structure on a glass substrate fabricated using an AZO anode formed at 260 °C showed turn-on voltage, maximum luminance, and current efficiency values of 5.3 V, 16680 cd/m2, and 4.8 cd/A, respectively.

Original languageEnglish
Article number01A101
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume31
Issue number1
DOIs
StatePublished - Jan 2013

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