Al₂O₃/MoO_xHole-Selective Passivating Contact for Silicon Heterojunction Solar Cell

Carrier selective contact (CSC) layers have been extensively studied to realize high passivation effect in solar cells. Excellent passivation properties of Al2O3 and a-Si:H(i) as passivating interlayers between the hole-selective contact (HSC) MoOx and p-type c-Si wafer surface are reported herein. MoOx single layer exhibits a high work function value (⩾5.0 eV), which can cause sufficient band bending in the band structure for HSC. An Al2O3/MoOx contact exhibits a significantly higher transmittance and surface passivation compared with that of an a-Si:H(i)/MoOx contact. The passivation results for Al2O3/MoOx contact are a carrier lifetime (τeff) of 830 μs and implied open circuit voltage (iVOC) of 726 mV, whereas for conventional a-Si:H(i)/MoOx contact, the corresponding values are 770 μs and 716 mV. Delicate thickness optimization was performed using experimental and simulation results for Al2O3/MoOx and a-Si:H(i)/MoOx stacks to achieve high performance in p-type c-Si solar cells.