All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim, Suk Ho Cho, Young Woo Ok, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	949-952
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	3
DOIs	https://doi.org/10.1116/1.1565348
State	Published - 2003
Externally published	Yes

Access to Document

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title = "All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes",

author = "Kim, \{Han Ki\} and Cho, \{Suk Ho\} and Ok, \{Young Woo\} and Seong, \{Tae Yeon\} and Yoon, \{Young Soo\}",

year = "2003",

doi = "10.1116/1.1565348",

language = "English",

volume = "21",

pages = "949--952",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

AU - Kim, Han Ki

AU - Cho, Suk Ho

AU - Ok, Young Woo

AU - Seong, Tae Yeon

AU - Yoon, Young Soo

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0037780226

U2 - 10.1116/1.1565348

DO - 10.1116/1.1565348

M3 - Article

AN - SCOPUS:0037780226

SN - 1071-1023

VL - 21

SP - 949

EP - 952

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

ER -