AEM study on the phase transformation of nickel silicides in the Ni 1-xTax/Si system

J. W. Lee; C. W. Yang

doi:10.4028/3-908451-31-0.45

AEM study on the phase transformation of nickel silicides in the Ni _1-xTa_x/Si system

J. W. Lee
, C. W. Yang

Department of Advanced Materials Science and Engineering

Sungkyunkwan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We investigated the phase transformation and thermal stability of Ni silicides formed in Ni/Si and Ni_0.95Ta_0.05/Si systems. The sheet resistance values of the silicide in the Ni_0.95Ta _0.05/Si system were lower than those in Ni/Si system at any temperature. The enhancement of thermal stability is closely related to the phase transformation occurred during post heat-treatment. Microstructure of the phases formed by reaction was investigated by analytical electron microscopy (AEM) and the phase identification of Ni silicide was carried out using convergent beam electron diffraction (CBED) technique. It was found that a Ta rich layer formed on the top of the Ni silicide layer and small amount of Ta dissolved into the silicide layer. By addition of Ta atoms, phase transformation from NiSi to NiSi₂ is retarded and thermal stability of Ni silicide is improved.

Original language	English
Title of host publication	Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
Publisher	Trans Tech Publications Ltd
Pages	45-48
Number of pages	4
Edition	PART 1
ISBN (Print)	3908451310, 9783908451310
DOIs	https://doi.org/10.4028/3-908451-31-0.45
State	Published - 2007
Event	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of Duration: 10 Sep 2006 → 14 Sep 2006

Publication series

Name	Solid State Phenomena
Number	PART 1
Volume	124-126
ISSN (Print)	1012-0394

Conference

Conference	IUMRS International Conference in Asia 2006, IUMRS-ICA 2006
Country/Territory	Korea, Republic of
City	Jeju
Period	10/09/06 → 14/09/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

AEM
CBED
Ni suicide
Phase identification
Thermal stability

Access to Document

10.4028/3-908451-31-0.45

Cite this

@inproceedings{904aedef28a84644b38848099379257f,

title = "AEM study on the phase transformation of nickel silicides in the Ni 1-xTax/Si system",

abstract = "We investigated the phase transformation and thermal stability of Ni silicides formed in Ni/Si and Ni0.95Ta0.05/Si systems. The sheet resistance values of the silicide in the Ni0.95Ta 0.05/Si system were lower than those in Ni/Si system at any temperature. The enhancement of thermal stability is closely related to the phase transformation occurred during post heat-treatment. Microstructure of the phases formed by reaction was investigated by analytical electron microscopy (AEM) and the phase identification of Ni silicide was carried out using convergent beam electron diffraction (CBED) technique. It was found that a Ta rich layer formed on the top of the Ni silicide layer and small amount of Ta dissolved into the silicide layer. By addition of Ta atoms, phase transformation from NiSi to NiSi2 is retarded and thermal stability of Ni silicide is improved.",

keywords = "AEM, CBED, Ni suicide, Phase identification, Thermal stability",

author = "Lee, \{J. W.\} and Yang, \{C. W.\}",

year = "2007",

doi = "10.4028/3-908451-31-0.45",

language = "English",

isbn = "3908451310",

series = "Solid State Phenomena",

publisher = "Trans Tech Publications Ltd",

number = "PART 1",

pages = "45--48",

booktitle = "Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia",

edition = "PART 1",

note = "IUMRS International Conference in Asia 2006, IUMRS-ICA 2006 ; Conference date: 10-09-2006 Through 14-09-2006",

}

Lee, JW & Yang, CW 2007, AEM study on the phase transformation of nickel silicides in the Ni _1-xTa_x/Si system. in Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1 edn, Solid State Phenomena, no. PART 1, vol. 124-126, Trans Tech Publications Ltd, pp. 45-48, IUMRS International Conference in Asia 2006, IUMRS-ICA 2006, Jeju, Korea, Republic of, 10/09/06. https://doi.org/10.4028/3-908451-31-0.45

AEM study on the phase transformation of nickel silicides in the Ni _1-xTa_x/Si system. / Lee, J. W.; Yang, C. W.
Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia. PART 1. ed. Trans Tech Publications Ltd, 2007. p. 45-48 (Solid State Phenomena; Vol. 124-126, No. PART 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - AEM study on the phase transformation of nickel silicides in the Ni 1-xTax/Si system

AU - Lee, J. W.

AU - Yang, C. W.

PY - 2007

Y1 - 2007

N2 - We investigated the phase transformation and thermal stability of Ni silicides formed in Ni/Si and Ni0.95Ta0.05/Si systems. The sheet resistance values of the silicide in the Ni0.95Ta 0.05/Si system were lower than those in Ni/Si system at any temperature. The enhancement of thermal stability is closely related to the phase transformation occurred during post heat-treatment. Microstructure of the phases formed by reaction was investigated by analytical electron microscopy (AEM) and the phase identification of Ni silicide was carried out using convergent beam electron diffraction (CBED) technique. It was found that a Ta rich layer formed on the top of the Ni silicide layer and small amount of Ta dissolved into the silicide layer. By addition of Ta atoms, phase transformation from NiSi to NiSi2 is retarded and thermal stability of Ni silicide is improved.

AB - We investigated the phase transformation and thermal stability of Ni silicides formed in Ni/Si and Ni0.95Ta0.05/Si systems. The sheet resistance values of the silicide in the Ni0.95Ta 0.05/Si system were lower than those in Ni/Si system at any temperature. The enhancement of thermal stability is closely related to the phase transformation occurred during post heat-treatment. Microstructure of the phases formed by reaction was investigated by analytical electron microscopy (AEM) and the phase identification of Ni silicide was carried out using convergent beam electron diffraction (CBED) technique. It was found that a Ta rich layer formed on the top of the Ni silicide layer and small amount of Ta dissolved into the silicide layer. By addition of Ta atoms, phase transformation from NiSi to NiSi2 is retarded and thermal stability of Ni silicide is improved.

KW - AEM

KW - CBED

KW - Ni suicide

KW - Phase identification

KW - Thermal stability

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DO - 10.4028/3-908451-31-0.45

M3 - Conference contribution

AN - SCOPUS:38549097269

SN - 3908451310

SN - 9783908451310

T3 - Solid State Phenomena

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BT - Advances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia

PB - Trans Tech Publications Ltd

T2 - IUMRS International Conference in Asia 2006, IUMRS-ICA 2006

Y2 - 10 September 2006 through 14 September 2006

ER -