Accurate fringe capacitance model considering RSD and metal contact for realistic FinFETs and circuit performance simulation

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, analytical gate fringe capacitance model of FinFETs including metal contact and raised source and drain (RSD) are developed. Each cross capacitance models are derived using conformal mapping and field integration. The proposed models are verified with a three-dimensional field solver, Raphael. By including the additional fringe capacitance from RSD and metal contact in BSIM-CMG platform, realistic transition frequency (fT) and propagation delay of 9-stage ring oscillators are predicted and compared with those predicted by default BSIM-CMG capacitance models.

Original languageEnglish
Title of host publicationInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages29-32
Number of pages4
ISBN (Electronic)9781479952885
DOIs
StatePublished - 20 Oct 2014
Event2014 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2014 - Yokohama, Japan
Duration: 9 Sep 201411 Sep 2014

Publication series

NameInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Conference

Conference2014 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2014
Country/TerritoryJapan
CityYokohama
Period9/09/1411/09/14

Keywords

  • Analytical model
  • BSIM-CMG
  • contact
  • FinFETs
  • fringe capacitance
  • parasitic
  • transition frequency

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