@inproceedings{170dcfe0fb934a05bb7e5d3eef5d7586,
title = "Accurate fringe capacitance model considering RSD and metal contact for realistic FinFETs and circuit performance simulation",
abstract = "In this paper, analytical gate fringe capacitance model of FinFETs including metal contact and raised source and drain (RSD) are developed. Each cross capacitance models are derived using conformal mapping and field integration. The proposed models are verified with a three-dimensional field solver, Raphael. By including the additional fringe capacitance from RSD and metal contact in BSIM-CMG platform, realistic transition frequency (fT) and propagation delay of 9-stage ring oscillators are predicted and compared with those predicted by default BSIM-CMG capacitance models.",
keywords = "Analytical model, BSIM-CMG, contact, FinFETs, fringe capacitance, parasitic, transition frequency",
author = "Kyeungkeun Choe and Taeyoon An and Soyoung Kim",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2014 ; Conference date: 09-09-2014 Through 11-09-2014",
year = "2014",
month = oct,
day = "20",
doi = "10.1109/SISPAD.2014.6931555",
language = "English",
series = "International Conference on Simulation of Semiconductor Processes and Devices, SISPAD",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "29--32",
booktitle = "International Conference on Simulation of Semiconductor Processes and Devices, SISPAD",
}