TY - GEN
T1 - A MEMS based microelectrode sensor with integrated signal processing circuitry
AU - Das, Angan
AU - Bhadri, Prashant R.
AU - Kumar, Alla S.
AU - Lee, Jin Hwan
AU - Papautsky, Ian
AU - Beyette, Fred R.
AU - Jang, Am
AU - Bishop, Paul L.
AU - Timmons, William
PY - 2005
Y1 - 2005
N2 - Microelectrodes have been developed over the last few years with tip diameters of 1-10 um, but they are fragile and susceptible to electrical interference. In addition, they are difficult to manufacture and operate, and are often unsuitable for measurement in small volumes of liquid or in soils. This limits their use to specialized laboratories under highly controlled conditions. The paper introduces a robust, self-contained, inexpensive MEMS based microelectrode sensor that can be used in situ environments. It deals with the design, analysis and performance of circuitry for a microelectrode sensor. The primary focus is to design, implement and integrate a CMOS circuit with the MEMS device to process, amplify and transmit the signal from the microelectrode to a measuring instrument. A current sensing circuit is developed for amperiometric measurement with the microelectrode array. The magnitude of the output signal is dependent on the characteristics of the liquid being evaluated by the system. A Printed Circuit Board (PCB) has been built to integrate the microelectrode sensor array along with the sensor chip with the aim of producing a fully integrated system.
AB - Microelectrodes have been developed over the last few years with tip diameters of 1-10 um, but they are fragile and susceptible to electrical interference. In addition, they are difficult to manufacture and operate, and are often unsuitable for measurement in small volumes of liquid or in soils. This limits their use to specialized laboratories under highly controlled conditions. The paper introduces a robust, self-contained, inexpensive MEMS based microelectrode sensor that can be used in situ environments. It deals with the design, analysis and performance of circuitry for a microelectrode sensor. The primary focus is to design, implement and integrate a CMOS circuit with the MEMS device to process, amplify and transmit the signal from the microelectrode to a measuring instrument. A current sensing circuit is developed for amperiometric measurement with the microelectrode array. The magnitude of the output signal is dependent on the characteristics of the liquid being evaluated by the system. A Printed Circuit Board (PCB) has been built to integrate the microelectrode sensor array along with the sensor chip with the aim of producing a fully integrated system.
UR - https://www.scopus.com/pages/publications/33847121329
U2 - 10.1109/MWSCAS.2005.1594113
DO - 10.1109/MWSCAS.2005.1594113
M3 - Conference contribution
AN - SCOPUS:33847121329
SN - 0780391977
SN - 9780780391970
T3 - Midwest Symposium on Circuits and Systems
SP - 363
EP - 366
BT - 2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005
T2 - 2005 IEEE International 48th Midwest Symposium on Circuits and Systems, MWSCAS 2005
Y2 - 7 August 2005 through 10 August 2005
ER -