@inproceedings{098ab995047a4153b075f16bf733ec3d,
title = "A-IGZO TFT fabrication using advanced imprint lithography",
abstract = "The imprint lithography has advantage of decreased process step. This study aims to fabricate a-IGZO TFT of bottom gate-type using the advanced imprint lithography. Before the imprinting, layers were deposited on the substrate. The surface was coated with resin to make pattern. Multi-layers were dry etched using the process gas.",
keywords = "A-IGZO TFT, Imprint lithography, Rollable OLED",
author = "Chae, \{Hee Nam\} and Kim, \{Sung Jin\} and Cho, \{Jae Wan\} and Cho, \{Sung Min\}",
note = "Publisher Copyright: {\textcopyright} 2018 International Display Workshops. All rights reserved.; 25th International Display Workshops, IDW 2018 ; Conference date: 12-12-2018 Through 14-12-2018",
year = "2018",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "349--352",
booktitle = "25th International Display Workshops, IDW 2018",
address = "Japan",
}