A high performance microfluidic system integrated with the micropump and microvalve on the same substrate

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system. The system is realized by means of a polydimethylsiloxane(PDMS)-glass chip and an indium tin oxide heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at a duty-ratio of 1% and a frequency of 2 Hz with a fixed power of 500 mW. The measured power at flow cut-off is 500 mW for the microvalve whose channel width, depth and membrane thickness were 400, 110 and 320 μm, respectively.