A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer

Pyeongjun Kim; Joohyun An; Kwanho You

doi:10.1007/978-3-642-35264-5_33

A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer

Pyeongjun Kim, Joohyun An, Kwanho You

Department of Electronic and Electrical Engineering

Sungkyunkwan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.

Original language	English
Title of host publication	Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings
Pages	245-253
Number of pages	9
DOIs	https://doi.org/10.1007/978-3-642-35264-5_33
State	Published - 2012
Event	2012 Int. Conf. on SecTech 2012, 2012 Int. Conf. on Control and Automation, CA 2012 and the 2012 Int. Conf. on Circuits, Control, Communication, Electricity, Electronics, Energy, System, Signal and Simulation, Held in Conjunction with GST 2012 - Jeju Island, Korea, Republic of Duration: 28 Nov 2012 → 2 Dec 2012

Publication series

Name	Communications in Computer and Information Science
Volume	339 CCIS
ISSN (Print)	1865-0929

Conference

Conference	2012 Int. Conf. on SecTech 2012, 2012 Int. Conf. on Control and Automation, CA 2012 and the 2012 Int. Conf. on Circuits, Control, Communication, Electricity, Electronics, Energy, System, Signal and Simulation, Held in Conjunction with GST 2012
Country/Territory	Korea, Republic of
City	Jeju Island
Period	28/11/12 → 2/12/12

Keywords

accuracy
error compensation
Fuzzy adaptive fading Kalman filter
fuzzy logic
laser interferometer

Access to Document

10.1007/978-3-642-35264-5_33

Cite this

Kim, P., An, J., & You, K. (2012). A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer. In Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings (pp. 245-253). (Communications in Computer and Information Science; Vol. 339 CCIS). https://doi.org/10.1007/978-3-642-35264-5_33

Kim, Pyeongjun ; An, Joohyun ; You, Kwanho. / A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer. Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings. 2012. pp. 245-253 (Communications in Computer and Information Science).

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abstract = "The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.",

keywords = "accuracy, error compensation, Fuzzy adaptive fading Kalman filter, fuzzy logic, laser interferometer",

author = "Pyeongjun Kim and Joohyun An and Kwanho You",

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note = "2012 Int. Conf. on SecTech 2012, 2012 Int. Conf. on Control and Automation, CA 2012 and the 2012 Int. Conf. on Circuits, Control, Communication, Electricity, Electronics, Energy, System, Signal and Simulation, Held in Conjunction with GST 2012 ; Conference date: 28-11-2012 Through 02-12-2012",

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Kim, P, An, J & You, K 2012, A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer. in Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings. Communications in Computer and Information Science, vol. 339 CCIS, pp. 245-253, 2012 Int. Conf. on SecTech 2012, 2012 Int. Conf. on Control and Automation, CA 2012 and the 2012 Int. Conf. on Circuits, Control, Communication, Electricity, Electronics, Energy, System, Signal and Simulation, Held in Conjunction with GST 2012, Jeju Island, Korea, Republic of, 28/11/12. https://doi.org/10.1007/978-3-642-35264-5_33

A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer. / Kim, Pyeongjun; An, Joohyun; You, Kwanho.
Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings. 2012. p. 245-253 (Communications in Computer and Information Science; Vol. 339 CCIS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Kim, Pyeongjun

AU - An, Joohyun

AU - You, Kwanho

PY - 2012

Y1 - 2012

N2 - The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.

AB - The advantage of a laser interferometer is in a high resolution required especially in extremely sensitive nano-metrology. However, there are some restrictions to overcome for precision measurement. One of the problems is a nonlinearity error. In this paper, we compensate for the nonlinearity error by applying the fuzzy adaptive fading Kalman filter (FAFKF) algorithm. To demonstrate the effectiveness of the proposed FAFKF algorithm, we simulated with a real system model. Experimental results show the improved accuracy and reliability.

KW - accuracy

KW - error compensation

KW - Fuzzy adaptive fading Kalman filter

KW - fuzzy logic

KW - laser interferometer

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DO - 10.1007/978-3-642-35264-5_33

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AN - SCOPUS:84869783089

SN - 9783642352638

T3 - Communications in Computer and Information Science

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BT - Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings

T2 - 2012 Int. Conf. on SecTech 2012, 2012 Int. Conf. on Control and Automation, CA 2012 and the 2012 Int. Conf. on Circuits, Control, Communication, Electricity, Electronics, Energy, System, Signal and Simulation, Held in Conjunction with GST 2012

Y2 - 28 November 2012 through 2 December 2012

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Kim P, An J, You K. A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer. In Computer Applications for Security, Control and System Engineering - International Conferences, SecTech, CA, CES3 2012, Held in Conjunction with GST 2012, Proceedings. 2012. p. 245-253. (Communications in Computer and Information Science). doi: 10.1007/978-3-642-35264-5_33

A fuzzy adaptive fading Kalman filter approach for accuracy improvement of a laser interferometer

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