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Secondary Ion Mass Spectrometer

  • Moonkyu Hong (Manager)

Equipment/facility: Equipment

    Equipments Details

    Description

    The TOF-SIMS.5 is a high-performance Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) instrument used for surface analysis. It is designed for high spatial and mass resolution analysis of solid materials, providing detailed chemical and molecular information. Key Features of TOF-SIMS.5: High Mass Resolution – Enables precise identification of molecular and elemental species. High Spatial Resolution – Allows for imaging at the nanometer scale. Depth Profiling – Analyzes the composition of layered structures. 3D Imaging – Constructs three-dimensional chemical maps. Ultra-High Sensitivity – Detects trace amounts of elements and molecules. Static SIMS Modes – Suitable for different types of surface analysis. Applications: Semiconductor Industry – Analyzing thin films and contamination. Material Science – Studying polymers, coatings, and nanomaterials. Pharmaceuticals & Life Sciences – Surface characterization of biomaterials. Environmental Science – Detection of trace elements in pollutants.

    Details

    NameTOF-SIMS
    Acquisition date1/12/07
    ManufacturersION-TOF

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