Equipments Details
Description
This advanced system integrates SEM, FIB, and Ar ion beam technologies, offering exceptional imaging and processing capabilities. The ion beam optical system achieves image resolutions below 4 nm and delivers a high current density exceeding 30 A/cm², enabling clear, high-resolution imaging. It also supports low-voltage ion beam operation (5 kV) with minimal sample damage, allowing for high-precision nanoscale processing, even at sub-picoampere ion currents.
Details
| Name | FIB 1 |
|---|---|
| Acquisition date | 1/03/06 |
| Manufacturers | SII |
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