Focused Ion Beam 1

  • Wonsang Shin (Manager)

Equipment/facility: Equipment

    Equipments Details

    Description

    This advanced system integrates SEM, FIB, and Ar ion beam technologies, offering exceptional imaging and processing capabilities. The ion beam optical system achieves image resolutions below 4 nm and delivers a high current density exceeding 30 A/cm², enabling clear, high-resolution imaging. It also supports low-voltage ion beam operation (5 kV) with minimal sample damage, allowing for high-precision nanoscale processing, even at sub-picoampere ion currents.

    Details

    NameFIB 1
    Acquisition date1/03/06
    ManufacturersSII

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