Feild Emission Auger Electron Spectrometer

  • Moonkyu Hong (Manager)

Equipment/facility: Equipment

    Equipments Details

    Description

    The JAMP-9510F is a Field Emission Auger Microprobe (FE-AES) developed by JEOL. It is designed for high-resolution surface analysis, providing detailed elemental and chemical state information with ultra-fine spatial resolution. Key Features of JAMP-9510F: High-Resolution Auger Electron Spectroscopy (AES) – Enables precise surface chemical analysis. Field Emission Electron Gun (FEG) – Delivers a highly focused electron beam for enhanced spatial resolution. Secondary Electron Imaging (SEI) – Provides high-contrast images of surface morphology. Depth Profiling – Uses ion sputtering to analyze layered structures. Ultra-High Vacuum (UHV) System – Ensures contamination-free measurements. Automated Operation – Simplifies data acquisition and analysis for efficient workflow. Applications: Semiconductor Industry – Analyzing thin films, contamination, and failure analysis. Material Science – Investigating metals, ceramics, and polymers at the nanoscale. Nanotechnology – Studying nanoparticles and nanostructures. Surface Chemistry – Characterizing oxidation, corrosion, and coatings.

    Details

    NameAES
    Acquisition date1/03/22
    ManufacturersJEOL

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