Ellipsometer

  • Moonkyu Hong (Manager)

Equipment/facility: Equipment

    Equipments Details

    Description

    The SENreserch4.0, when configured as an ellipsometer, is an advanced platform for non-destructive optical surface analysis. It integrates multiple ellipsometric techniques to deliver high-resolution, precise measurements of thin film properties. Depending on the configuration and application, it can determine film thickness, refractive index, extinction coefficient, and other optical constants, enabling detailed characterization of complex, multilayer structures. Key Features of SENreserch4.0: Non-Destructive Optical Analysis: Accurately measures thin film properties without damaging the sample. Film Thickness Determination: Precisely calculates the thickness of various films and coatings. Optical Constants Extraction: Determines key parameters such as the refractive index and extinction coefficient. Multi-Layer Analysis: Capable of analyzing complex, multilayer structures for detailed optical characterization. Advanced Data Processing: Utilizes sophisticated software to process ellipsometric data in real time for high precision results. Applications: Materials Science & Engineering: Enables detailed studies of coatings, films, and composite materials to understand their structural and mechanical properties. Semiconductor Industry: Provides high-resolution inspection of wafer surfaces and thin films, crucial for quality control and process optimization.

    Details

    NameEllipsometer
    Acquisition date1/03/22
    ManufacturersSENTECH

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